fig14

Figure 14. Flexible Parylene C waveguide optogenetic probe^[66]: (A) Schematic of the traditional in-plane/out-of-plane illumination from an end-firing waveguide; (B) A conceptual schematic of a Parylene photonic waveguide neural probe with a 45° aluminum reflector; (C) Photograph of flexible Parylene waveguide array with a bonded VCSEL chip. This figure is adapted from Ref.^[66]. Copyright © 2020 The Author(s). VCSEL: Vertical-cavity surface-emitting laser; PDMS: polydimethylsiloxane; ACF: anisotropic conductive film; PCB: printed circuit board.