fig2

Figure 2. Site-specific and conformal fabrication of plasmonic nanostructures for ASC-PR. (A) Schematic of femtosecond laser in situ direct writing of Ag/Pd alloy nanostructures on the surface of a soft magnetic robot; (B) Optical images of soft magnetic milli-robots with Ag/Pd alloy patterns conformally integrated on curved surfaces; (C) SEM images of patterned Ag/Pd regions at different magnifications; (D) AFM characterization of Ag/Pd nanoparticles; (E) EDS elemental mapping of Ag/Pd patterns; (F) Depth profiling of Ag/Pd patterns on soft substrates (400 µm squares), with 3D reconstruction (inset); (G) Dependence of Ag/Pd nanoparticle size on single-point laser exposure duration; (H) Influence of laser power and exposure time on pattern linewidth, scale bar is 1µm. ASC-PR: Actuation-Sensing Coupled Plasmonic Robotics; SEM: scanning electron microscopy; AFM: atomic force microscopy; EDS: energy-dispersive X-ray spectroscopy.