fig3

Figure 3. Curves of infrared-light-source chip temperature, stress, and deformation versus the center distance under a working voltage of 12 V. (A-C) Quantitative temperature, stress, and deformation data along the X-axis for suspended, semi-closed, and closed membrane infrared chips; (D-F) Quantitative temperature, stress, and deformation data along the Y-axis for the suspended, semi-closed, and closed membrane infrared chips.