fig6

Figure 6. Endurance cycling characteristics of HZO capacitors. Endurance characteristics were evaluated for HZO capacitors with Mo and MoN_x electrodes using bipolar rectangular pulses at 100 kHz. The evolution of (A-C) 2P_r and (D-F) 2E_c and imprint field [E_imp = (E_c⁺ + E_c^-)/2] was monitored as a function of switching cycles. In (D-F), solid symbols represent 2E_c plotted on the left y-axis, whereas hollow symbols denote E_imp plotted on the right y-axis. The black arrowed circles in D-F highlight representative 2E_c (left-pointing arrows) and E_imp (right-pointing arrows) data to clarify their corresponding y-axes. The data were obtained under applied voltages of 2.4 V (A and D), 2.0 V (B and E), and 1.6 V (C and F); (G-I) Benchmark comparison of ferroelectric properties with other stoichiometrically controlled electrode systems, including TaN_x[a], RuO_x[b], and TiN_x[c,d]. (G) Pristine-state 2P_r values and (H) percentage change in 2P_r after wake-up (Δ2P_r) plotted against relative stoichiometry. For this work, data were extracted from Figure 6A, where Δ2P_r is defined as [(2P_{r, max} - 2P_{r, pristine})/2P_{r, pristine}] × 100%. Comparative data were obtained under electric fields of 2.5 MV∙cm^-1 for TaN_x and RuO_x and 3.0 MV∙cm^-1 for this work and TiN_x. (I) Benchmark comparison of endurance cycles plotted against relative stoichiometry. Endurance data for this work and RuO_x[b] were obtained under an electric field of 2.5 MV∙cm^-1, whereas data for TiN_x[c,d] were evaluated at 3.0 MV∙cm^-1. References [a]-[d] correspond to references^[48-51], respectively. HZO: Hf_0.5Zr_0.5O₂.